• Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching 

      Baracu, Angela; Dirdal, Christopher Andrew; Avram, Andrei; Dinescu, Adrian; Muller, Raluca; Jensen, Geir Uri; Thrane, Paul Conrad Vaagen; Angelskår, Hallvard (Peer reviewed; Journal article, 2021)
      The research field of metasurfaces has attracted considerable attention in recent years due to its high potential to achieve flat, ultrathin optical devices of high performance. Metasurfaces, consisting of artificial ...
    • Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography 

      Baracu, Angela; Avram, Marius Andrei; Breazu, Carmen; Bunea, Mihaela-Cristina; Socol, Marcela; Stanculescu, Anca; Matei, Elena; Thrane, Paul Conrad Vaagen; Dirdal, Christopher Andrew; Dinescu, Adrian; Rasoga, Oana (Peer reviewed; Journal article, 2021)
      This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint ...